Differential acoustic wave sensors
AssigneeSoitec
InventorsSylvain Ballandras, Emilie Courjon, Florent Bernard, Thierry LaRoche, Julien Garcia
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AssigneeSoitec
InventorsSylvain Ballandras, Emilie Courjon, Florent Bernard, Thierry LaRoche, Julien Garcia
Estimating the term…
An acoustic wave sensor device, comprising an interdigitated transducer; a first reflection structure arranged on one side of the interdigitated transducer, and a second reflection structure arranged on another side of the interdigitated transducer; a first resonance cavity comprising a first upper surface and formed between the interdigitated transducer and the first reflection structure; a second resonance cavity comprising a second upper surface and formed between the interdigitated transducer and the second reflection structure; and wherein the second upper surface comprises a physical and/or chemical modification as compared to the first upper surface.
Acoustic wave sensor device, comprising:
Dependencies are inferred from the claim text.