Back to results
US 12,392,486 B2Granted
Optimising operating conditions in an abatement apparatus
AssigneeEdwards Limited
InventorsDuncan Michael Price, Michael Colin Graham
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeEdwards Limited
InventorsDuncan Michael Price, Michael Colin Graham
Estimating the term…
A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.
A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a semiconductor processing tool, said method comprising:
An apparatus for optimising/adjusting operating conditions in an abatement apparatus configured to treat an effluent stream from a semiconductor processing tool, said apparatus comprising:
Dependencies are inferred from the claim text.