Silicon-containing film forming composition and method for manufacturing silicon-containing film using the same

A silicon-containing film forming composition comprising:

• (I) a polymer having a polysilane skeleton comprising a repeating unit represented by the formula (ia):
• wherein
• Ra is each independently a single bond, hydrogen, halogen, C1-6 alkyl, C6-10 aryl or —SiRA3 (where RA is each independently hydrogen or C1-8 alkyl), and
• p is an integer of 5 or more;
• (II) a carbodiimide compound represented by the formula (ii):
• wherein
• R1 and R2 are each independently hydrogen, a mono- to trivalent, C1-30, linear, branched or cyclic, saturated or unsaturated aliphatic hydrocarbon group, a mono- to trivalent, C6-30 aromatic hydrocarbon group, or —SiRz3 (where Rz is each independently a mono- or divalent, C1-8 aliphatic hydrocarbon group), where R1 and R2 can be bonded each other to form a ring structure;
• and
• (III) a solvent.