US 12,391,542 B2 · Microelectromechanical actuator on insulating substrate

Abstract

The present disclosure relates to an apparatus, system, and method for a microelectromechanical (MEM) device formed on a transparent, insulating substrate. The MEM device may take the form of an electrostatic comb actuator. The fabrication process employs three-dimensional structuring of the substrate to form the actuator combs, biasing elements, and linkages. The combs and other elements of the actuator may be rendered electrically conducting by a conformal conductive coating. The conductive coating may be segmented into a plurality of electrodes without the use of standard lithography techniques. A linear-rotational actuator is provided, which may comprise two perpendicularly-arranged, linear actuators that utilize moveable linkage beams in two orthogonal dimensions. A linear or torsional ratcheting actuator is also provided by using comb actuators in conjunction with a ratcheting wheel or cog. Furthermore, several methods for electrically connecting non-contiguous or enclosed elements are provided.

Claims9

Dependent claims

A microelectromechanical device comprising:

an insulating substrate characterized by an upper surface defining a plane including a first actuator formed therein, said first actuator comprising:
a first electrode disposed on a stationary comb having a first plurality of spaced tines projecting from a first crossbeam;
and
a second electrode including:
a moveable comb including a second plurality of spaced tines projecting from a second crossbeam in a direction, wherein said second plurality of spaced tines meshes with said first plurality of spaced tines in an interdigitated fashion;
and
at least one biasing element coupled to said moveable comb,
wherein the stationary comb, the movable comb, and the at least one biasing element are formed below said plane,
wherein said second electrode is electrically decoupled from said first electrode by at least one segmented feature selected from the group consisting of:
a trench, an undercut, an overhang, and a suspended element,
and wherein, in operation, a variable voltage is applied across said first electrode and said second electrode to induce displacement of said moveable comb parallel to said plane.

8 more elements

Dependencies are inferred from the claim text.

Microelectromechanical actuator on insulating substrate

Life of this patent

Microelectromechanical actuator on insulating substrate

Life of this patent

Abstract

Claims9