Device and method for generating a plurality of grooves
Assignee4Jet Microtech GmbH
InventorTobias Dyck
Life of this patent
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Abstract
A laser processing device for generating a plurality of grooves in a surface comprises an optical diffraction arrangement adapted to receive a laser radiation and to generate an output radiation hereupon, the output radiation having a plurality of intensity maxima. An actuator arrangement is provided for generating a relative movement between the output radiation and the surface, wherein each intensity maximum generates a groove of the plurality of grooves.
Claims16
A laser processing device for generating a plurality of grooves in a surface, the laser processing device comprising:
- an optical diffraction arrangement adapted to receive a laser radiation and to generate an output radiation hereupon, the output radiation having a plurality of intensity maxima;
- an actuator arrangement for generating a relative movement between the output radiation and the surface, wherein each intensity maximum generates a groove of the plurality of grooves;
- and
- a beam path adapted to direct the output radiation onto the surface;
- wherein the diffraction arrangement comprises at least one optical element;
- wherein the at least one optical element is adapted to generate a phase difference between a plurality of portions of the output radiation and to generate the plurality of intensity maxima in the output radiation by generating the plurality of phase differences, wherein the plurality of intensity maxima are generated by interference in the output radiation;
- wherein the at least one optical element is a reflective optical element;
- and
- wherein the at least one optical element comprises a body made of metal or a semiconductor material.
A method of generating a plurality of grooves in a surface, the method comprising:
- directing a laser radiation onto an optical diffraction arrangement to generate an output radiation, the output radiation having a plurality of intensity maxima;
- directing the output radiation onto the surface via a beam path;
- and
- generating a relative movement between the output radiation and the surface, wherein each intensity maximum generates a groove of the plurality of grooves;
- wherein the diffraction arrangement comprises at least one optical element;
- wherein the at least one optical element is adapted to generate a phase difference between a plurality of portions of the output radiation and to generate the plurality of intensity maxima in the output radiation by generating the plurality of phase differences, wherein the plurality of intensity maxima are generated by interference in the output radiation;
- wherein the at least one optical element is a reflective optical element;
- and
- wherein the at least one optical element comprises a body made of metal or a semiconductor material.
Dependencies are inferred from the claim text.