Semiconductor laser and method of manufacturing semiconductor laser

A method of manufacturing a semiconductor laser, comprising:

• forming a stacked body by stacking a first cladding layer of a first conductivity type, a second cladding layer of a second conductivity type, and a light emission layer provided between the first cladding layer and the second cladding layer on a semiconductor substrate;
• forming a ridge part having a projection structure extending in one direction at a top surface in a stacking direction of the stacked body;
• forming a dividing groove from the top surface toward a depth direction, the dividing groove being curved;
• and
• subjecting the stacked body to singulation to allow both end parts in the extending direction of the ridge part to each have a shape including an arc in a plan view of the stacked body from the top surface, wherein
• a plan shape of the stacked body in the plan view from the top surface is a longitudinal shape that extends in the extending direction,
• the both end surfaces of the stacked body in the extending direction are provided to be convex or concave with respect to the stacked body,
• the both end surfaces are provided to be substantially flat in a region corresponding to the ridge part, and
• in the region in which the both end surfaces are substantially flat, the both end surfaces have irregularities of a magnitude greater than or equal to 0.02 μm and smaller than or equal to 0.1 μm.

A semiconductor laser comprising:

• a stacked body in which a first cladding layer of a first conductivity type, a second cladding layer of a second conductivity type, and a light emission layer provided as a semipolar plane between the first cladding layer and the second cladding layer are stacked on a semiconductor substrate;
• and
• a ridge part provided as a projection structure extending in one direction at a top surface in a stacking direction of the stacked body, in which
• the stacked body is provided to have both end surfaces in the extending direction of the ridge part that each have a shape including an arc in a plan view of the stacked body from the top surface,
• a plan shape of the stacked body in the plan view from the top surface is a longitudinal shape that extends in the extending direction,
• the both end surfaces of the stacked body in the extending direction are provided to be convex or concave with respect to the stacked body,
• the both end surfaces are provided to be substantially flat in a region corresponding to the ridge part, and
• in the region in which the both end surfaces are substantially flat, the both end surfaces have irregularities of a magnitude greater than or equal to 0.02 μm and smaller than or equal to 0.1 μm.