Teaching method for transfer device, and transfer system
AssigneeTokyo Electron Limited
InventorsTakashi Sugimoto, Shinya Okano
Life of this patent
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Abstract
A teaching method for a transfer device provided with a pick configured to hold a substrate and a mapping sensor, includes detecting a position of an edge of the substrate arranged in a teaching target module by the mapping sensor and setting a teaching position in one horizontal direction, transferring the substrate from the teaching target module to a stage of an alignment device by the pick based on the set teaching position, rotating the stage by a predetermined angle and detecting a locus of the position of the edge of the substrate, and estimating an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.
Claims9
A teaching method for a transfer device that includes a pick configured to hold a substrate and a mapping sensor, comprising:
- detecting a position of an edge of the substrate arranged in a teaching target module by the mapping sensor and setting a teaching position in one horizontal direction;
- transferring the substrate from the teaching target module to a stage of an alignment device by the pick based on the set teaching position;
- rotating the stage by a predetermined angle and detecting a locus of the position of the edge of the substrate;
- and
- estimating an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.
A transfer system, comprising:
- a transfer device including a pick configured to hold a substrate and a mapping sensor;
- an alignment device;
- and
- a controller,
- wherein the controller is configured to:
- control the transfer device to detect a position of an edge of the substrate arranged in a teaching target module by the mapping sensor;
- set a teaching position in one horizontal direction based on the detected position of the edge of the substrate;
- control the transfer device to transfer the substrate from the teaching target module to a stage of the alignment device by the pick based on the set teaching position;
- control the alignment device to rotate the stage by a predetermined angle and detect a locus of the position of the edge of the substrate;
- and
- estimate an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.
Dependencies are inferred from the claim text.