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US 12,385,832 B2Granted
Terahertz wave detection chip and terahertz wave detection system
AssigneeIndustrial Technology Research Institute
InventorsYu-Tai Li, Kao-Chi Lin, Cho-Fan Hsieh, Teng-Chun Wu
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Abstract
A terahertz wave detection chip includes a substrate and at least one detection structure. The detection structure is disposed on a surface of the substrate. The detection structure includes a metamaterial layer and a hydrophilic layer, and the hydrophilic layer is disposed on the metamaterial layer.
Claims20
A terahertz wave detection chip, comprising:
- a substrate;
- and
- at least one detection structure disposed on a surface of the substrate, wherein the at least one detection structure comprises a metamaterial layer and a hydrophilic layer, and the hydrophilic layer is disposed on the metamaterial layer;
- wherein the hydrophilic layer facilitates spreading of a microdroplet containing a low concentration object over the metamaterial layer, thereby enabling detection of changes in dielectric properties via frequency shifts in reflected terahertz waves.
1 more element
A terahertz wave detection chip, comprising:
- a substrate;
- and
- at least one detection structure disposed on a surface of the substrate, wherein the at least one detection structure comprises a metamaterial layer and a hydrophilic layer, and the hydrophilic layer is disposed on the metamaterial layer;
- wherein a number of the at least one detection structure is multiple, and the detection structures are periodically arranged.
1 more element
A terahertz wave detection system, comprising:
- a terahertz wave detection chip, comprising:
- a substrate;
- and
- a detection structure disposed on a surface of the substrate, wherein the detection structure comprises a metamaterial layer and a hydrophilic layer, the hydrophilic layer is disposed on the metamaterial layer, and the metamaterial layer comprises a resonance pattern;
- a transmitter configured to deliver a terahertz wave corresponding to the resonance pattern in the terahertz wave detection chip;
- a receiver configured to receive a reflected wave corresponding to the terahertz wave from the terahertz wave detection chip;
- and
- a processor in signal-transmittable connection with the receiver, wherein the processor obtains the reflected wave from the receiver and determines a detected object characteristic according to the reflected wave.
5 more elements
Dependencies are inferred from the claim text.