Method of manufacturing reference sample, method of measuring droplet, and apparatus for measuring droplet
AssigneeSamsung Display Co., Ltd.
InventorsYoung Soo Ko, Yeon Jae Lee
Life of this patent
Estimating the term…
Abstract
A method of manufacturing a reference sample includes discharging a droplet, obtaining a plurality of captured images by capturing the droplet according to a predetermined period with respect to an imaginary plane defined on a falling path of a discharged droplet, analyzing the plurality of captured images, and marking a point corresponding to the falling path of the droplet on a sample substrate based on a result of analyzing the plurality of captured images.
Claims20
A method of measuring a droplet discharged from a nozzle onto a substrate, the method comprising:
- discharging the droplet;
- radiating light between the substrate and the nozzle according to a predetermined period during a period from a time point at which the droplet is discharged from the nozzle to a time point at which the droplet arrives on the substrate;
- obtaining a droplet capture image by receiving the light radiated from a light source and passed through the droplet falling toward the substrate;
- and
- comparing the droplet capture image with a reference sample,
- wherein the reference sample includes marking points that were generated on a two-dimensional surface or image by discharging a reference droplet and indicating a reference falling path of the reference droplet on the reference sample prior to the discharging of the droplet.
An apparatus for measuring a droplet discharged from a nozzle onto a substrate comprising:
- a light irradiator which radiates light between the substrate and the nozzle according to a predetermined period during a period from a time point at which the droplet is discharged from the nozzle to a time point at which the droplet arrives on the substrate;
- an imaging generator which receives the light radiated from the light irradiator and passed through the droplet falling toward the substrate to generate a droplet capture image;
- and
- a droplet analyzer which compares the droplet capture image with a reference sample,
- wherein the reference sample includes marking points that were generated on a two-dimensional surface or image by discharging a reference droplet and indicating a reference falling path of the reference droplet on the reference sample prior to the discharging of the droplet.
Dependencies are inferred from the claim text.