Etchant
AssigneesSamsung Display Co., Ltd., Dongwoo Fine-Chem Co., Ltd.
InventorsShinhyuk Yang, Beomsoo Kim, Hyeonsu Cho, Yujin Kim, Jeehoon Kim, Youngjin Yoon, Eunwon Lee, Donghan Kang
Life of this patent
Estimating the term…
Abstract
An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; sulfate; and water, wherein a tip control index (Y) of the etchant is a value of at least about 45.0 and not more than about 70.0, the tip control index (Y) being a value calculated by Equation 1: Y=1.0×10−3×M(X1)+1.0×10−1×M(X2)+5.0×10−2×M(X3)+1.5×M(X1)×M(X2)+2.0×10−1×M(X1)×M(X3)+2.0×10−1×M(X2)×M(X3) Equation 1 The description of Equation 1 is as in the specification.
Claims20
An etchant comprising:
- persulfate;
- a fluorine-containing compound;
- a chlorine-containing compound;
- a cyclic amine compound;
- an inorganic acid;
- sulfate;
- and
- water,
- wherein,
- a tip control index (Y) of the etchant is a value of at least about 45.0 and not more than about 70.0,
- the tip control index (Y) being a value calculated by <Equation 1>:
- Y=1.0×10−3×M(X1)+1.0×10−1×M(X2)+5.0×10−2×M(X3)+1.5×M(X1)×M(X2)+2.0×10−1×M(X1)×M(X3)+2.0×10−1×M(X2)×M(X3) Equation 1
- wherein, in Equation 1,
- M(X1) indicates wt % of the chlorine-containing compound with respect to 100 wt % in total of the etchant,
- M(X2) indicates wt % of the sulfate with respect to 100 wt % in total of the etchant, and
- M(X3) indicates wt % of the water with respect to 100 wt % in total of the etchant.
Dependencies are inferred from the claim text.