Iodine-containing metal compound and composition for depositing thin film including the same
AssigneeDnf Co., Ltd.
InventorsYong Hee Kwone, Young Jae Im, Sang Yong Jeon, Tae Seok Byun, Sang Chan Lee, Sang Ick Lee
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Abstract
Provided are an iodine-containing metal compound, a composition for depositing a metal-containing thin film including the same, and a method of manufacturing a metal-containing thin film using the same. Since the composition for depositing a thin film according to one embodiment is present in a liquid state at room temperature, it has excellent storage and handling properties, and since the composition has high reactivity, a metal thin film may be efficiently formed using the composition.
Claims16
An iodine-containing metal compound represented by the following Chemical Formula 2:
- wherein
- M1 is a Sn or Pb;
- R11 is hydrogen or C1-7 alkyl;
- R12 is C1-7 alkyl;
- R13 is C1-7 alkyl, C2-7 alkenyl, or —NR15R16;
- R14 is —NR15R16;
- and
- in which R15 and R16 are independently of each other hydrogen or C1-7 alkyl.
A composition for depositing a metal-containing thin film, comprising an iodine-containing metal compound represented by the following Chemical Formula 2:
- wherein
- M1 is a Sn or Pb;
- R11 is hydrogen or C1-7 alkyl;
- R12 is C1-7 alkyl;
- R13 is C1-7 alkyl, C2-7 alkenyl, or —NR15R16;
- R14 is —NR15R16;
- and
- in which R15 and R16 are independently of each other hydrogen or C1-7 alkyl.
A composition for depositing a metal-containing thin film, comprising an iodine-containing metal compound represented by the following Chemical Formula 3:
- wherein
- M2 is a Sb;
- R21 is hydrogen or C1-7 alkyl;
- R22 is C1-7 alkyl;
- and
- R23 is C1-7 alkyl, C2-7 alkenyl, or —NR25R26, in which R25 and R26 are independently of each other hydrogen or C1-7 alkyl.
An iodine-containing metal compound represented by the following Chemical Formula 3:
- wherein
- M2 is a Sb;
- R21 is hydrogen or C1-7 alkyl;
- R22 is C1-7 alkyl;
- and
- R23 is C1-7 alkyl, C2-7 alkenyl, or —NR25R26, in which R25 and R26 are independently of each other hydrogen or C1-7 alkyl.
Dependencies are inferred from the claim text.