Aluminum nitride powder and method for manufacturing the same
AssigneeTokuyama Corporation
InventorsYoshinori Tagashira, Yoshiaki Yamashita, Masato Hamamoto
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Abstract
Provided is an aluminum nitride powder useful as a raw material when an aluminum nitride sintered body excellent as an insulating high thermal conductive member is manufactured, particularly, by press molding. An aluminum nitride powder includes particles having a sphericity of 0.8 or more, in which a median size D50 obtained by a laser diffraction method is 0.5 to 1.5 μm, a ratio D90/D50 of a particle size D90 corresponding to a cumulative undersize distribution of 90% to the D50 is 2.2 or less, a BET specific surface area is 2 to 4 m2/g, and a total oxygen concentration is 0.6 to 1.2% by mass.
Claims4
An aluminum nitride powder comprising primary particles having a sphericity of 0.8 or more, wherein
- a median size D50 obtained by a laser diffraction method is 0.5 to 1.5 μm, a ratio D90/D50 of a particle size D90 corresponding to a cumulative undersize distribution of 90% to the D50 is 2.0 or less, and a particle size D10 corresponding to a cumulative undersize distribution of 10% is ranged from 0.62 μm to 0.66 μm,
- a BET specific surface area is 2 to 4 m2/g,
- a total oxygen content is 0.6 to 1.2% by mass, and
- a pressurized bulk density is 1.62 g/cm3 or greater,
- wherein the aluminum nitride powder is prepared by:
- reducing and nitriding a raw material powder containing an aluminum oxide powder and a carbon powder under nitrogen to produce a synthetic powder containing aluminum nitride aggregated particles and a carbon powder;
- disintegrating the synthetic powder in a disintegrating treatment without using a medium to produce a disintegrated synthetic powder;
- and
- oxidizing off excess carbon from the disintegrated synthetic powder to obtain the aluminum nitride powder.
Dependencies are inferred from the claim text.