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US 12,382,846 B2Granted
Ferroelectric components and cross point array devices including the ferroelectric components
AssigneeSK hynix Inc.
InventorsJae Gil Lee, Hyangkeun Yoo, Jae Hyun Han
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Abstract
A ferroelectric component includes a first electrode, a tunnel barrier layer disposed on the first electrode to include a ferroelectric material, a tunneling control layer disposed on the tunnel barrier layer to control a tunneling width of electric charges passing through the tunnel barrier layer, and a second electrode disposed on the tunneling control layer.
Claims18
A ferroelectric component comprising:
- a first electrode;
- a tunnel barrier layer disposed on the first electrode to include a ferroelectric material, the tunnel barrier layer having remnant polarizations with different polarization directions of the ferroelectric material;
- a tunneling control layer disposed on the tunnel barrier layer;
- and
- a second electrode disposed on the tunneling control layer,
- wherein the tunnel barrier layer further comprises conductive filaments extending from an interface between the tunneling control layer and the tunnel barrier layer into the tunnel barrier layer, and
- wherein the conductive filaments do not contact the first electrode.
4 more elements
A cross point array device comprising:
- a first conductive line;
- a second conductive line overlapping the first conductive line;
- and
- a pillar structure disposed at a cross point of the first and second electrodes, the pillar structure including a self-rectifying layer, a tunnel barrier layer, and a tunneling control layer,
- wherein the self-rectifying layer includes an insulation material,
- wherein the tunnel barrier layer includes a ferroelectric material,
- wherein the tunnel barrier layer has remnant polarizations with different polarization directions of the ferroelectric material,
- wherein the tunneling control layer includes a conductive material,
- wherein the tunnel barrier layer further comprises conductive filaments extending from an interface between the tunneling control layer and the tunnel barrier layer into the tunnel barrier layer, and
- wherein the conductive filaments do not contact the first electrode.
7 more elements
Dependencies are inferred from the claim text.