Photoelectric conversion apparatus having filler member and airgap arranged in interior of trench portion, photoelectric conversion system, and moving body

A photoelectric conversion comprising:

• a plurality of photoelectric conversion circuits configured to be arranged in a semiconductor layer having a first plane and a second plane opposite to the first plane,
• wherein the plurality of photoelectric conversion circuits are individually isolated by an isolation structure,
• wherein the semiconductor layer includes a plurality of trench portions arranged on the first plane,
• wherein the plurality of trench portions are configured of a first trench portion extending in a first direction as an in-plane direction of the first plane and a second trench portion extending in a second direction as an in-plane direction of the first plane intersecting with the first direction,
• wherein a filler member and an airgap are arranged, in an interior of a trench portion at a position where the first trench portion and the second trench portion intersect with each other, and in an interior of the isolation structure, and
• wherein a length of the airgap from one end portion on a side of the first plane to another end portion on a side of the second plane, arranged in the interior of the trench portion, is shorter than a length of the airgap from one end portion on the side of the first plane to another end portion on the side of the second plane, arranged in the interior of the isolation structure.

A photoelectric conversion apparatus comprising:

• a plurality of photoelectric conversion circuits configured to be arranged in a semiconductor layer having a first plane and a second plane opposite to the first plane,
• wherein the plurality of photoelectric conversion circuits are individually isolated by an isolation structure,
• wherein the semiconductor layer includes a plurality of trench portions arranged on the first plane,
• wherein the plurality of trench portions are configured of a first trench portion extending in a first direction as an in-plane direction of the first plane and a second trench portion extending in a second direction as an in-plane direction of the first plane intersecting with the first direction,
• wherein a filler member and an airgap are arranged, in an interior of a trench portion at a position where the first trench portion and the second trench portion intersect with each other, and in an interior of the isolation structure, and
• wherein a region between the airgap arranged at the position where the first trench portion and the second trench portion intersect with each other and the airgap arranged in the first trench portion is filled with the filler member.