Acousto-optic system having phase-shifting reflector
AssigneeElectro Scientific Industries, Inc.
InventorsJames Brookhyser, Jan Kleinert, Jered Richter
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AssigneeElectro Scientific Industries, Inc.
InventorsJames Brookhyser, Jan Kleinert, Jered Richter
Estimating the term…
A beam positioner for deflecting a beam path, along which a diffracted beam of linearly polarized laser light is propagatable, within a two-dimensional scan field, the beam positioner includes a first acousto-optic deflectors (AOD) to deflect the beam path within a first one-dimensional scan field extending along a first axis of the two-dimensional scan field, a second AOD to deflect the beam path within a second one-dimensional scan field extending along a second axis of the two-dimensional scan field, a phase retarder arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD and a mirror arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD.
A beam positioner, comprising:
A beam positioner, comprising:
A beam positioner, comprising:
Dependencies are inferred from the claim text.