Wafer optical processing device and sintering furnace
AssigneeIllinois Tool Works Inc.
InventorWenhua Su
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AssigneeIllinois Tool Works Inc.
InventorWenhua Su
Estimating the term…
The present application provides a wafer optical processing device and a sintering furnace, said wafer optical processing device comprising: a wafer support device (140a, 140b), an upper light source device (402), and a lower light source device (502). Said wafer support device is provided with a support piece (305), said support piece being configured to be capable of supporting said wafer above said upper surface; said upper light source device is disposed above said wafer support device and is configured to provide a light source that illuminates the upper surface of said support piece; said lower light source device is disposed below said wafer support device and is configured to provide a light source that illuminates a lower surface of said support piece. A wafer optical processing device provided by the present application is capable of processing a wafer efficiently.
A wafer optical processing device, for optically processing a sintered wafer, the wafer optical processing device comprising:
A sintering furnace, comprising:
Dependencies are inferred from the claim text.