Methods and apparatus for controlling plasma in a plasma processing system
AssigneeLam Research Corporation
InventorsJohn C. Valcore, Jr., Bradford J. Lyndaker
Life of this patent
Estimating the term…
Loading patent…
AssigneeLam Research Corporation
InventorsJohn C. Valcore, Jr., Bradford J. Lyndaker
Estimating the term…
Methods and apparatus for processing a substrate in a multi-frequency plasma processing chamber are disclosed. The base RF signal pulses between a high power level and a low power level. Each of the non-base RF generators, responsive to a control signal, proactively switches between a first predefined power level and a second predefined power level as the base RF signal pulses. Alternatively or additionally, each of the non-base RF generators, responsive to a control signal, proactively switches between a first predefined RF frequency and a second predefined RF frequency as the base RF signal pulses. Techniques are disclosed for ascertaining in advance of production time the first and second predefined power levels and/or the first and second predefined RF frequencies for the non-base RF signals.
A system comprising:
Dependencies are inferred from the claim text.