Adhesion promoting photoresist underlayer composition

A photoresist underlayer composition, comprising:

• a poly (arylene ether) derived from a compound containing two or more cyclopentadienone moieties,
• an additive of formula (15):
• a solvent,
• wherein, in formula (15),
• D is a polyvalent C1-30 alkyl, a polyvalent C3-30 cycloalkyl, a polyvalent C6-30 aryl, or a polyvalent C6-30 heteroaryl,
• each Ar5 is a monocyclic or polycyclic C6-60 arylene group or a monocyclic or polycyclic C5-60 heteroarylene group,
• each X is independently —OR30, —SR31, or —NR32R33,
• R30 to R33 are each independently hydrogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C1-30 heteroalkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C2-30 heterocycloalkyl, substituted or unsubstituted C2-30 alkenyl, substituted or unsubstituted C2-30 alkynyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C3-30 heteroaryl, or substituted or unsubstituted C4-30 heteroarylalkyl, each of which except hydrogen optionally further comprises as part of its structure one or more of substituted or unsubstituted C1-30 alkylene, substituted or unsubstituted C3-30 cycloalkylene, substituted or unsubstituted C2-30 alkenylene, substituted or unsubstituted C4-30 cycloalkenylene, substituted or unsubstituted C2-30 alkynylene, substituted or unsubstituted C1-30 heterocycloalkylene, substituted or unsubstituted C6-30 arylene, substituted or unsubstituted C4-30 heteroarylene, —O—, —C(O)—, —C(O)O—, —S—, —S(O)—, —S(O) 2—, or —NR34— wherein R34 is substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C1-20 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C4-30 heteroaryl, substituted or unsubstituted C5-30 heteroarylalkyl, or substituted or unsubstituted C5-30 alkylheteroaryl,
• m is an integer of 2 to 4, and
• each n is independently an integer of 1 to 5, provided that the sum of n is 3 or greater.

A photoresist underlayer composition, comprising:

• a poly (arylene ether) derived from a compound containing two or more cyclopentadienone moieties;
• an additive of formula (14):
• D-(L1-Ar—[X]n)m (14);
• and
• a solvent,
• wherein, in formula (14),
• D is —(C(O)O−)(M+) or —(NH3+)(Z−),
• M+ is an organic cation,
• Z− is an organic anion,
• each L1 is independently a divalent linking group,
• m is 1,
• each Ar is independently a monocyclic or polycyclic C5-60 aromatic group,
• each X is independently —OR30, —SR31, or —NR32R33,
• n is an integer of 2 to 4, and
• R30 to R33 are each independently hydrogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C1-30 heteroalkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C2-30 heterocycloalkyl, substituted or unsubstituted C2-30 alkenyl, substituted or unsubstituted C2-30 alkynyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C3-30 heteroaryl, or substituted or unsubstituted C4-30 heteroarylalkyl, each of which except hydrogen optionally further comprises as part of its structure one or more of substituted or unsubstituted C1-30 alkylene, substituted or unsubstituted C3-30 cycloalkylene, substituted or unsubstituted C2-30 alkenylene, substituted or unsubstituted C4-30 cycloalkenylene, substituted or unsubstituted C2-30 alkynylene, substituted or unsubstituted C1-30 heterocycloalkylene, substituted or unsubstituted C6-30 arylene, substituted or unsubstituted C4-30 heteroarylene, —O—, —C(O)—, —C(O)O—, —S—, —S(O)—, —S(O)2—, or —NR34— wherein R34 is substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C1-20 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C4-30 heteroaryl, substituted or unsubstituted C5-30 heteroarylalkyl, or substituted or unsubstituted C5-30 alkylheteroaryl.