US 12,379,392 B2 · Surface analysis device

Abstract

The present invention pertains to a surface analysis device (1) and provides a technology that can increase accuracy and quality of measurement and analysis even when a local deviation is generated in height information of a measurement result of a scanning probe microscope (SPM) (2), due to an atmospheric pressure change with respect to an airtight tank (10). The surface analysis device (1) is provided with: an airtight tank (10); a stage (6) that holds a sample (5) in the airtight tank (10); the SPM (2) that is fixed to a structure configuring the airtight tank (1) and that measures the surface of the sample (5); a sensor (4) that is disposed outside of the airtight tank (10) and that measures atmospheric pressure; and a computer system that analyzes the surface of the sample by using a first signal obtained through measurement by the SPM (2) and a second signal obtained through measurement by the sensor (4).

Claims9

Dependent claims

A surface analysis device comprising:

an airtight tank having a decompressable or pressurizable interior;
a stage configured to hold a sample within the airtight tank;
a scanning probe microscope fixed to a structure forming the airtight tank and configured to measure a surface of the sample;
a sensor disposed outside the airtight tank and configured to measure an atmospheric pressure;
and
a computer system configured to analyze the surface of the sample using a first signal measured by the scanning probe microscope and a second signal measured by the sensor.

3 more elements

Dependencies are inferred from the claim text.

Surface analysis device

Life of this patent

Surface analysis device

Life of this patent

Abstract

Claims9