Method of measuring efficiency for optical devices
AssigneeApplied Materials, Inc.
InventorsJinxin Fu, Yangyang Sun, Kazuya Daito, Ludovic Godet
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Abstract
Embodiments of the present disclosure relate to measurement systems and methods of measuring efficiency of optical devices. In one example, the measurement systems include a light source, a mirror, an illumination source, and a sensor. The light source provides a light beam to the optical device to be diffracted into diffraction beams having diffraction orders. The diffractions beams form a diffraction pattern. The method includes positioning the optical device in the measurement system and directing the diffraction beams to the sensor. The sensor is operable to measure the efficiency of the optical device by measuring the diffraction pattern.
Claims7
A measurement system, comprising:
- a light source configured to project a light beam;
- an objective lens disposed in the light beam, the light beam including diffraction beams;
- a first mirror operable to reflect the diffraction beams from the objective lens through two or more relay lenses;
- a sensor disposed adjacent to the two or more relay lenses, wherein the two or more relay lenses are positioned to direct the diffraction beams having a diffraction pattern to the sensor;
- and
- an illumination source disposed opposite of the light source, the illumination source configured to project white light toward a second mirror, the second mirror positioned to reflect the white light toward the objective lens.
Dependencies are inferred from the claim text.