Mass flow controller with advanced back streaming diagnostics

A diagnostics system for controlling operation of a mass flow controller, the diagnostics system comprising:

• a controller communicable coupled to at least one sensor and to a valve, the controller tuned to control the valve based on a predetermined set point value and communication from the at least one sensor, the controller is configured to:
• monitor a reverse flow of a fluid through a flow path of the mass flow controller;
• compare the reverse flow to a predetermined reverse flow;
• in response to determining that the reverse flow exceeds the predetermined reverse flow, log the date, time, and a device identifier;
• and
• control operation of the mass flow controller based on the comparison.

A method of controlling operation of a mass flow controller, the method comprising:

• receiving data from at least one sensor;
• controlling a valve based on a predetermined set point value and communication from the at least one sensor;
• monitoring at least one of a reverse flow of a fluid through a flow path of the mass flow controller or a reverse flow over a period of time;
• comparing the at least one of the reverse flow or the reverse flow over the period of time to a corresponding one of a predetermined reverse flow or a predetermined reverse flow over the period of time;
• and
• in response to determining that the reverse flow exceeds the predetermined reverse flow, logging the date, time, and a device identifier;
• controlling operation of the mass flow controller based on the comparison.