Peripheral edge processing apparatus, peripheral edge processing method, and computer-readable recording medium

A peripheral edge processing method, comprising:

• capturing, by an image capturing device, a peripheral edge portion of a substrate, which includes a reference substrate and a workpiece substrate, so as to acquire a captured image of the reference substrate and a captured image of the workpiece substrate;
• receiving, by a controller, the captured image of the reference substrate and the captured image of the workpiece substrate from the image capturing device
• calculating, by the controller, a theoretical peripheral edge position of the reference substrate in the captured image of the reference substrate with reference to a center of the reference substrate;
• calculating, by the controller, a theoretical peripheral edge position of the workpiece substrate in the captured image of the workpiece substrate based on the theoretical peripheral edge position of the reference substrate and the captured image of the workpiece substrate;
• setting, by the controller, processing parameters for the peripheral edge portion of the substrate based on the theoretical peripheral edge position of the workpiece substrate;
• processing, by a substrate processing unit including a substrate holder, the peripheral edge portion of the substrate based on the processing parameters;
• adjusting, by the controller, a placement position of the workpiece substrate on the substrate holder of the substrate processing unit from a first placement position to a second placement position according to an eccentricity state of the workpiece substrate placed and processed on the substrate holder,
• performing, by the controller, a fourth process of calculating a peripheral edge position of the workpiece substrate based on the captured image of the workpiece substrate, and a fifth process of calculating the eccentricity state of the workpiece substrate based on the peripheral edge position of the workpiece substrate
• calculating, by the controller, the second placement position of the workpiece substrate to cancel an eccentricity amount of the workpiece substrate with respect to the substrate holder;
• generating, by the controller, a control signal for delivering the workpiece substrate to the substrate holder at the second placement position of the workpiece substrate;
• outputting, by the controller, the control signal to a transfer arm;
• and
• receiving, by the transfer arm, the control signal and, by the received control signal, delivering the workpiece substrate to the substrate holder at the second placement position of the workpiece substrate.