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US 12,378,108 B2Granted
Lens for a microelectromechanical system mirror
AssigneeTeknologian tutkimuskeskus VTT Oy
InventorTapio Pernu
Life of this patent
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Abstract
According to an example aspect of the present invention, there is provided a lens for a Microelectrical System, MEMS, mirror apparatus, comprising a circular top surface, the circular top surface being provided with a recess having an inclined surface extending from the circular top surface and a side wall having an inclined section extending from the circular top surface, wherein the inclined section is inclined towards the recess and the inclined surface is inclined outward of the recess towards the inclined section.
Claims20
A lens for a Microelectrical System, MEMS, mirror apparatus, comprising:
- a circular top surface, the circular top surface being provided with a recess having an inclined surface extending from the circular top surface;
- and
- a side wall having an inclined section extending from the circular top surface, wherein the inclined section is inclined towards the recess and the inclined surface is inclined outward of the recess towards the inclined section.
Dependencies are inferred from the claim text.