# US 12,377,503 B2 · Part replacement system and part replacement device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,377,503 B2 - Document ID: US12377503B2 - Status: Granted - Kind: B2 - Application number: 18/638,830 - Filed: 2024-04-18 - Published: 2024-08-08 - Granted: 2025-08-05 - Earliest claimed: 2020-05-01 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Atsushi Sawachi; Ichiro Sone; Suguru Sato; Takuya Nishijima - Web page: https://patentgrep.com/patent/US12377503B2 ## CPC - B23Q 3/1556: {of non-rotary tools (in combination with rotary tools: B23Q3/15506, B23Q3/15513)} - H10P 72/3404: {Storage means} - H10P 72/0441: {Apparatus for sealing, encapsulating, glassing, decapsulating or the like} - H10P 72/0462: {characterised by the construction of the processing chambers, e.g. modular processing chambers} - H10P 72/0464: {characterised by the construction of the transfer chamber} - H10P 72/3214: {by means of a cart or a vehicle} - H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support} - B23Q: DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING (tools of the kind used in lathes or boring machines B23B27/00); MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A part replacement system includes a part storage device configured to store an unused consumable part, and a replacement device that is connected to a processing device and the part storage device, the replacement device being configured to replace a used consumable part installed in the processing device with the unused consumable part stored in the part storage device. The replacement device is moved to a position of the processing device having the used consumable part that requires replacement, and the replacement device is connected to the processing device, and the part storage device is moved to a position of the replacement device connected to the processing device having the used consumable part that requires replacement, and the part storage device is connected to the replacement device. ## Claims ### Claim 1 A part replacement system, the system comprising: a mobile part container configured to store a part; a mobile robot housing connectable to a processing chamber and the mobile part container, the mobile robot housing including a robot being configured to replace a part to be replaced installed in the processing chamber with the part stored in the mobile part container; and a control circuit configured to instruct the mobile robot housing to connect to the processing chamber having the part to be replaced, and instruct the mobile part container to connect to the mobile robot housing. ### Claim 2 (depends on 1) The part replacement system of claim 1, wherein the robot further includes: a transfer arm configured to transfer the part and the part to be replaced between the processing chamber and the mobile part container through the mobile robot housing; and an operation arm configured to remove the part to be replaced and place the part to be replaced onto the transfer arm to be removed from the processing chamber, the operation arm being further configured to install the part placed on the transfer arm in the processing chamber. ### Claim 3 (depends on 2) The part replacement system of claim 2, further comprising a mobile jig storage container configured to store an end effector to be attached to a tip end of the operation arm, wherein the control circuit is configured to: instruct the mobile jig storage container to connect to the mobile robot housing; and instruct the mobile robot housing to control the operation arm to extract the end effector used for replacing the part to be replaced, attach the end effector to the tip end of the operation arm, and replace the part to be replaced by using the end effector. ### Claim 4 (depends on 3) The part replacement system of claim 3, wherein the end effector includes a sensor, the operation arm is configured to sense an inner state of the processing chamber by using the sensor attached to the tip end thereof before replacing the part to be replaced, the mobile robot housing includes an arm circuit configured to determine whether or not the part to be replaced is replaceable based on a sensing result from the operation arm, and if it is determined that the part to be replaced is replaceable, the arm circuit is configured to control the operation arm to replace the part to be replaced, and if it is determined that the part to be replaced is not replaceable, the arm circuit is configured to notify an operator of a determination result. ### Claim 5 (depends on 4) The part replacement system of claim 4, wherein the mobile jig storage container is further configured to store a mount to be attached to the tip end of the transfer arm, and the arm circuit is further configured to control the transfer arm to extract the mount and transfer the part to be replaced by using the extracted mount. ### Claim 6 (depends on 3) The part replacement system of claim 3, wherein the mobile jig storage container is further configured to store a mount to be attached to the tip end of the transfer arm, the mobile robot housing includes an arm circuit configured to control the transfer arm to extract the mount and transfer the part to be replaced by using the extracted mount. ### Claim 7 (depends on 3) The part replacement system of claim 3, wherein the mobile part container is configured to store a plurality of types of parts, the part being one type of the plurality of types of parts, wherein one or more of each type are stored. ### Claim 8 (depends on 3) The part replacement system of claim 3, wherein the mobile part container is configured to store a plurality of parts of a same type of the part. ### Claim 9 (depends on 3) The part replacement system of claim 3, wherein the mobile robot housing includes a valve configured to control a pressure in the mobile robot housing; and the valve is configured to control the pressure in the mobile robot housing to be higher than a pressure in the processing chamber when the part to be replaced installed in the processing chamber is replaced. ### Claim 10 (depends on 3) The part replacement system of claim 3, wherein the mobile robot housing includes: a first power source configured to move the mobile robot housing; a first sensor configured to sense the surrounding of the mobile robot housing; and a first mobile control circuit configured to control the first power source based on a sensing result of the first sensor to move the mobile robot housing to a position of the processing chamber having the part to be replaced that requires the robot. ### Claim 11 (depends on 3) The part replacement system of claim 3, wherein the mobile part container includes: a second power source configured to move the mobile part container; a second sensor configured to sense the surrounding of the mobile part container; and a second mobile control circuit configured to control the second power source based on a sensing result of the second sensor to move the mobile part container to a position of the mobile robot housing. ### Claim 12 (depends on 1) The part replacement system of claim 1, wherein the mobile part container is configured to store a plurality of types of parts, the part being one type of the plurality of types of parts, wherein one or more of each type are stored. ### Claim 13 (depends on 1) The part replacement system of claim 1, wherein the mobile part container is configured to store a plurality of parts of a same type of the part. ### Claim 14 (depends on 1) The part replacement system of claim 1, wherein the mobile robot housing includes a valve configured to control a pressure in the mobile robot housing; and the valve is configured to control the pressure in the mobile robot housing to be higher than a pressure in the processing chamber when the part to be replaced installed in the processing chamber is replaced. ### Claim 15 (depends on 1) The part replacement system of claim 1, wherein the mobile robot housing includes: a first power source configured to move the mobile robot housing; a first sensor configured to sense the surrounding of the mobile robot housing; and a first mobile control circuit configured to control the first power source based on a sensing result of the first sensor to move the mobile robot housing to a position of the processing chamber having the part to be replaced that requires the robot. ### Claim 16 (depends on 1) The part replacement system of claim 1, wherein the mobile part container includes: a second power source configured to move the mobile part container; a second sensor configured to sense the surrounding of the mobile part container; and a second mobile control circuit configured to control the second power source based on a sensing result of the second sensor to move the mobile part container to a position of the mobile robot housing. ### Claim 17 (depends on 1) The part replacement system of claim 1, wherein the mobile robot housing includes: an upper container housing the robot; and a lower container housing a gas supply configured to control a pressure of the upper container. ### Claim 18 (depends on 1) The part replacement system of claim 1, wherein the mobile robot housing includes: a first gate on a first side of the mobile robot housing to be open to retrieve a part from the mobile part container when connected to the mobile part container; and a second gate on a second side of the mobile robot housing to be opened to replace the part in the processing chamber when connected to the processing chamber.