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US 12,376,417 B2Granted
Semiconductor device with nanostructures
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsin-Hsiang Tseng, Chih-Fei Lee, Chia-Pin Cheng, Fu-Cheng Chang
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Abstract
An image sensor device includes nanostructures for improving light absorption efficiency. The image sensor device includes a substrate, a light absorption region, and a nanostructure array. The light absorption region is over the substrate. The nanostructure array us over the light absorption region. The nanostructure array includes a plurality of nanostructures repeatedly arranged from a top view.
Claims20
An image sensor device, comprising:
- a substrate;
- a light absorption region over the substrate;
- and
- a nanostructure array over the light absorption region, the nanostructure array comprising a plurality of nanostructures repeatedly arranged from a top view, wherein the plurality of nanostructures are at least partially embedded within the light absorption region.
1 more element
An image sensor device, comprising;
- a semiconductor substrate;
- a photo sensing region in the semiconductor substrate;
- and
- a nanostructure array over the photo sensing region, wherein the nanostructure array comprises a plurality of nanostructures disposed over the photo sensing region from a cross-sectional view, and the plurality of nanostructures have polygonal patterns from a top view, wherein the plurality of nanostructures are at least partially embedded within the photo sensing region.
1 more element
An image sensor device, comprising:
- a semiconductor substrate;
- a photo sensing region in the semiconductor substrate;
- and
- a nanostructure array over the photo sensing region, wherein the nanostructure array comprises a plurality of nanostructures above the photo sensing region from a cross-sectional view, and the plurality of nanostructures are periodically arranged from a top view, wherein the plurality of nanostructures are arranged in a hexagonal arrangement, an octagonal arrangement, or a triangular arrangement.
1 more element
Dependencies are inferred from the claim text.