Vibrator device, vibrator, and electronic device
AssigneeSeiko Epson Corporation
InventorsMasataka Nomura, Norihito Matsukawa
Life of this patent
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AssigneeSeiko Epson Corporation
InventorsMasataka Nomura, Norihito Matsukawa
Estimating the term…
A vibrator device includes a first excitation electrode, a first pad electrode, and a first drawn wiring line that are disposed at a first surface of a vibrator element, a second excitation electrode, a second pad electrode, and a second drawn wiring line that are disposed at a second surface of the vibrator element, and a spiral first electrode pattern disposed at the first surface of the vibrator element. The first excitation electrode and the second excitation electrode are disposed so as to face each other with the vibrator element therebetween. A first central end section of the first electrode pattern is electrically coupled to the second drawn wiring line via a through electrode provided in the vibrator element. A first outer circumferential end section of the first electrode pattern is electrically coupled to the first drawn wiring line. The first drawn wiring line is electrically coupled to at least one of the first excitation electrode and the first pad electrode. The second drawn wiring line is electrically coupled to at least one of the second excitation electrode and the second pad electrode.
A vibrator device comprising:
Dependencies are inferred from the claim text.