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US 12,374,525 B2Granted
Plasma processing tool and operating method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung Chang Huang, Chia Jung Hsu, Yu Hsiu Chen
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Abstract
The method includes placing a wafer in a chamber body of a plasma processing tool; moving a first movable jig along an arc path to comb a spiral-shaped radio frequency (RF) coil over the chamber body, the first movable jig having a plurality of first confining slots penetrated by a plurality of coil segments of the spiral-shaped RF coil, respectively; and generating plasma in the chamber body through the spiral-shaped RF coil.
Claims20
A method, comprising:
- placing a wafer in a chamber body of a plasma processing tool;
- moving a first movable jig along an arc path to comb a spiral-shaped radio frequency (RF) coil over the chamber body, the first movable jig having a plurality of first confining slots penetrated by a plurality of coil segments of the spiral-shaped RF coil, respectively;
- and
- generating plasma in the chamber body through the spiral-shaped RF coil, wherein moving the first movable jig to comb the spiral-shaped RF coil is performed prior to generating the plasma in the chamber body through the spiral-shaped RF coil.
1 more element
A method, comprising:
- disposing a wafer in a chamber body of a plasma processing tool and below a spiral-shaped radio frequency (RF) coil, the spiral-shaped RF coil having coil segments respectively extending through confining slots of a movable comb;
- changing a first local distance between coil segments of the spiral-shaped RF coil by changing a vertical distance between the confining slots of the movable comb;
- and
- generating plasma in the chamber body through the spiral-shaped RF coil.
1 more element
A plasma processing tool, comprising:
- a chamber body;
- a belljar over the chamber body;
- a housing over the belljar;
- a substrate support in the chamber body;
- a spiral radio frequency (RF) coil above the substrate support, wherein the spiral RF coil is on an inner sidewall of the housing;
- a movable jig having confining legs laterally extending past coil segments of the spiral RF coil, the confining legs and the coil segments being arranged in an alternating manner, and the movable jig being movable along an arc path, wherein the movable jig is movable along the inner sidewall of the housing in a clockwise or counterclockwise direction;
- and
- a radio frequency power source connected to the spiral RF coil.
5 more elements
Dependencies are inferred from the claim text.