Guardbands in substrate processing systems
AssigneeApplied Materials, Inc.
InventorsJimmy Iskandar, Fei Li, James Robert Moyne
Life of this patent
Estimating the term…
Abstract
A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates that have property values that meet threshold values. The method further includes determining, based on the trace data, a dynamic acceptable area outside of guardband limits. The method further includes causing, based on the dynamic acceptable area outside of the guardband limits, performance of a corrective action associated with the substrate processing system.
Claims20
A method comprising:
- identifying trace data comprising a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates that have property values that meet threshold values;
- determining, based on the trace data, a dynamic acceptable area outside of guardband limits;
- and
- causing, based on the dynamic acceptable area outside of the guardband limits, performance of a corrective action associated with the substrate processing system.
A method comprising:
- identifying trace data comprising a plurality of data points, the trace data being associated with substrate production via a substrate processing system;
- comparing the trace data to an acceptable area outside of guardband limits;
- and
- responsive to one or more data points of the trace data being within the acceptable area, updating the acceptable area outside of the guardband limits based on the trace data, wherein performance of a corrective action associated with the substrate processing system is based on at least a portion of the trace data being outside of the acceptable area outside of the guardband limits.
A non-transitory computer-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:
- identifying trace data comprising a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates that have property values that meet threshold values;
- determining, based on the trace data, a dynamic acceptable area outside of guardband limits;
- and
- causing, based on the dynamic acceptable area outside of the guardband limits, performance of a corrective action associated with the substrate processing system.
Dependencies are inferred from the claim text.