Laser irradiation apparatus, laser irradiation method, and recording medium recording program to be readable

A laser irradiation method causing a computer that performs control related to laser emitted from a laser light source and is communicably connected to a first detection unit and a second detection unit configured to detect luminance of a substrate irradiated with laser light from the laser light source to execute processes of:

• performing a preparation process comprising:
• (A) specifying an optimum energy density of laser light based on luminance detected by the first detection unit;
• and
• (B) specifying a reference luminance based on luminance detected by the second detection unit at the optimum energy density;
• and
• performing a production process comprising:
• (C) changing an energy density of laser light according to luminance detected by the second detection unit as compared to the reference luminance when a substrate is irradiated with laser light at a specified energy density.

A recording medium recording a program to be readable, the program causing a computer that performs control related to laser emitted from a laser light source and is communicably connected to a first detection unit and a second detection unit configured to detect luminance of a substrate irradiated with laser light from the laser light source to execute processes of:

• performing a preparation process comprising:
• (A) specifying an optimum energy density of laser light based on luminance detected by the first detection unit;
• and
• (B) specifying a reference luminance based on luminance detected by the second detection unit at the optimum energy density;
• and
• performing a production process comprising:
• (C) changing an energy density of laser light according to luminance detected by the second detection unit as compared to the reference luminance when a substrate is irradiated with laser light at a specified energy density.