MEMS gas sensor, array thereof and preparation method therefor

A Micro-Electro-Mechanical System (MEMS) gas sensor, comprising a first substrate with a first surface on which a first cavity is provided, N gas detection components disposed at an opening of the first cavity, wherein N is a positive integer greater than or equal to 2, wherein:

• each gas detection component comprises a support arm and a gas detection part disposed on the support arm;
• the gas detection part comprises a strip-shaped heating electrode part, an insulating layer, a strip-shaped detection electrode part and a gas sensitive material part, that are sequentially stacked;
• the strip-shaped detection electrode part comprises a first detection electrode part and a second detection electrode part, a first opening is provided between the first detection electrode part and the second detection electrode part, the gas sensitive material part is disposed at a position of the first opening, a first end of the gas sensitive material part is connected with the first detection electrode part, and a second end of the gas sensitive material part is connected with the second detection electrode part;
• strip-shaped heating electrode parts in all gas detection components are sequentially connected to form a heater;
• wherein the MEMS gas sensor further comprises:
• one or N first detection electrode pins and one or N second detection electrode pins, that are disposed on the first substrate, wherein
• a first end of one first detection electrode part is connected with a first end of one gas sensitive material part, a second end of the first detection electrode part is connected with one first detection electrode pin, and
• a first end of one second detection electrode part is connected with a second end of one gas sensitive material part, and a second end of the second detection electrode part is connected with one second detection electrode pin.