Method of shielding capacitive pressure sensor
AssigneeSporian Microsystems, Inc.
InventorsEvan Pilant, Dale Schoonover, Jakob Oreskovich, Brittany McGrogan, William VanHoose
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Abstract
A method of shielding a capacitive pressure transducer by positioning an insulated shield spacer between the capacitor electrodes, covering the two electrodes with an electrically conductive shield box, applying a sensor voltage from a first voltage source across the two electrodes, and applying a shield voltage from a second voltage source to the insulated shield spacer and to the shield box.
Claims1
A method of shielding and avoiding parasitic capacitances in a variable capacitor pressure sensor in which two electrodes are positioned adjacent to each other with a gap between them, wherein at least one of the two electrodes is movable in relation to the other of the two electrodes, comprising:
- positioning a spacer between portions of the two electrodes, wherein the spacer comprises an electrically conductive shield layer sandwiched between a first electrically insulative layer and a second electrically insulative layer;
- covering the two electrodes with an electrically conductive shield box;
- applying a sensor voltage from a first voltage source across the two electrodes;
- and
- applying a shield voltage from a second voltage source, which is equal in magnitude to the sensor voltage at all points in time, to the electrically conductive shield layer and to the electrically conductive shield box.
Dependencies are inferred from the claim text.