Adjustable transition edge thermometer
AssigneeInternational Business Machines Corporation
InventorsAndrea Gemma, Bernd W. Gotsmann
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Abstract
Described are a temperature sensor, a semiconductor device, and a method of measuring a temperature of a sample. One embodiment of the temperature sensor may comprise a probe circuit, the probe circuit having a thermal operational range. The temperature sensor may further comprise a thermal resistor separating the probe circuit from a sample. The temperature sensor may further comprise a heating circuit adapted to maintain the probe circuit within the thermal operational range.
Claims18
A temperature sensor, comprising:
- a probe circuit, the probe circuit having a thermal operational range;
- a thermal resistor separating the probe circuit from a sample;
- and
- a heating circuit adapted to maintain the probe circuit within the thermal operational range.
A semiconductor device, comprising:
- a substrate;
- and
- a contact thermometer attached to the substrate, the contact thermometer comprising:
- a probe circuit, the probe circuit having a thermal operational range;
- a thermal resistor separating the probe circuit from the substrate;
- and
- a heating circuit adapted to maintain the probe circuit within the thermal operational range.
A method of measuring a temperature of a sample, comprising:
- heating a sensor element comprising a phase change material to a temperature within a thermal operational range of the sensor element, wherein the sensor element is separated from the sample with a thermal resistor;
- measuring an amount of power applied to maintain the sensor element at the temperature;
- converting the measured amount of power to a sample temperature;
- and
- outputting the sample temperature.
Dependencies are inferred from the claim text.