Quartz glass crucible and manufacturing method thereof
AssigneeSumco Corporation
InventorsMasami Ohara, Hiroshi Kishi, Eriko Kitahara
Life of this patent
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Abstract
A quartz glass crucible (1) has a structure wherein a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface (10i) of the crucible is present at a position deeper than the inner surface (10i). In an exemplary embodiment, the quartz glass crucible is capable of improving the yield of a silicon single crystal by suppressing peeling-off of brown rings.
Claims15
A quartz glass crucible characterized in that a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface of the crucible is present at a position within a depth range of 16 μm or more than 32 μm or less from the inner surface, and
- the peak value of the total concentration of Na, K, and Ca within the range of 16 μm or more and 32 μm or less from the inner surface is 2 times or more and 19 times or less an average value of the total concentration of Na, K, and Ca within a depth range of 0 μm or more and 8 μm or less from the inner surface.
A quartz glass crucible characterized in that a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface of the crucible is present at a position within a depth range of 16 μm or more or more and 32 μm or less from the inner surface, and
- an average value of the total concentration of Na, K, and Ca within a depth range of 32 μm or more and 1000 μm or less from the inner surface is 0.6 time or more and 1 time or less the average value of the total concentration of Na, K, and Ca within a depth range of 0 μm or more and 8 μm or less from the inner surface.
A quartz glass crucible characterized in that a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface of the crucible is present at a position within a depth range of 16 μm or more and 32 μm or less from the inner surface, and
- an average value of at total concentration of Li, Al, Na, and Ca within a depth range of 0 μm or more and 8 μm or less form the crucible inner surface is 3.6×1016 atoms/cc or more and 5.5×1017 atoms/cc or less.
Dependencies are inferred from the claim text.