Method for forming product structure having porous regions and lateral encapsulation
AssigneesMurata Manufacturing Co., Ltd., Commissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFrédéric Voiron, Brigitte Soulier, Guy Parat
Life of this patent
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Abstract
A structure that includes: an insulating layer; a first metal layer above a first portion of the insulating layer; a first porous region of anodic oxide, above and in contact with the first metal layer; and a second porous region of anodic oxide, surrounding the first porous region, in contact with a second portion of the insulating layer adjacent to the first portion of the insulating layer, and in contact with the first metal layer, the second porous region forming an insulating region.
Claims16
A structure, comprising:
- a substrate;
- an insulating layer above the substrate;
- a first metal layer above a first portion of the insulating layer;
- a first porous region of anodic oxide, above and in contact with the first metal layer;
- and
- a second porous region of anodic oxide, surrounding the first porous region, in contact with a second portion of the insulating layer adjacent to the first portion of the insulating layer, and in contact with the first metal layer, the second porous region forming an insulating region.
A method of fabricating a structure, the method comprising:
- forming an insulating layer above a substrate;
- depositing a first metal layer above a first portion of the insulating layer;
- forming a first porous region of anodic oxide, above and in contact with the first metal layer;
- and
- forming a second porous region of anodic oxide, surrounding the first porous region, in contact with a second portion of the insulating layer adjacent to the first portion of the insulating layer, and in contact with the first metal layer, the second porous region forming an insulating region.
Dependencies are inferred from the claim text.