Integrated polymer-derived ceramic thin-film sensor produced by laser pyrolysis and additive manufacturing and fabrication method thereof

Abstract

An integrated polymer-derived ceramic (PDC) thin-film sensor produced by laser pyrolysis and additive manufacturing and a fabrication method thereof are provided. Using a metal component or an insulating material as a substrate, a PDC-doped composite insulating film layer with high density, high insulation, and high temperature resistance is formed by a layer-by-layer laser pyrolysis and additive manufacturing on the surface of the metal component, and a strain sensitive layer with excellent electrical conductivity is obtained by Weissenberg direct writing process PDC-doped filler sensitive grid on the composite insulating film layer and laser pyrolysis enhancing graphitization of PDC. In this way, the in situ integrated laser fabrication of highly insulating film layer, sensitive grid with excellent electrical conductivity, and metal substrate based on PDC materials is developed, which achieves the laser processing of “liquid-solid-function” transformation of PDC composites and allows the successful use thereof in strain sensing of metallic materials.

Dependencies are inferred from the claim text.