Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device

A micro-nano channel structure, comprising:

• a base substrate;
• a base layer, on the base substrate and comprising a plurality of protrusions;
• and
• a plurality of micro-nano channels, wherein at least one of the micro-nano channels is at a side of the base layer away from the base substrate, wherein
• a recessed portion is provided between adjacent protrusions in the plurality of protrusions, on a plane roughly perpendicular to an extension direction of the recessed portion, a cross-sectional shape of each of the protrusions is semi-circular.

A micro-nano channel structure, comprising:

• a base substrate;
• a base layer, on the base substrate and comprising a plurality of protrusions, the plurality of protrusions roughly extend along a first direction;
• and
• a plurality of micro-nano channels, wherein orthographic projections of the plurality of micro-nano channels on a plane perpendicular to a main surface of the base substrate and roughly parallel to the first direction overlap or do not overlap with orthographic projections of corresponding adjacent protrusions on the plane perpendicular to the main surface of the base substrate and roughly parallel to the first direction;
• a recessed portion is provided between adjacent protrusions in the plurality of protrusions, on a plane roughly perpendicular to an extension direction of the recessed portion, a cross-sectional shape of each of the protrusions is semi-circular.