Tape affixing apparatus
AssigneeDisco Corporation
InventorKunishige Suzuki
Life of this patent
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Abstract
A tape affixing apparatus includes a holding unit that holds a wafer and a ring frame, a peeling plate that peels off a dicing tape from a sheet by bending a tape set at an acute angle, an affixing roller configured to affix the dicing tape to the wafer and the ring frame by pressing the dicing tape peeled off from the sheet by the peeling plate against the wafer and the ring frame, an air nozzle that makes a distal end of the dicing tape peeled off from the sheet conform to an outside surface of the affixing roller, and an end detecting unit that detects the distal end of the dicing tape made to conform to the outside surface of the affixing roller.
Claims8
A tape affixing apparatus for using a tape set including a tape, the tape having an adhesive layer on one surface of the tape and being cut in a shape corresponding to an affixation target object, and a band-shaped sheet affixed to the adhesive layer, and affixing the tape to the affixation target object while peeling off the tape from the sheet, the tape affixing apparatus comprising:
- a holding unit configured to hold the affixation target object;
- an affixing unit configured to affix the tape peeled off from the sheet to the affixation target object held by the holding unit;
- and
- a horizontal moving mechanism configured to move the holding unit and the affixing unit relative to each other in a horizontal direction,
- the affixing unit including:
- a first roller set configured to sandwich the tape set by at least two rollers,
- a second roller set configured to sandwich the sheet by at least two rollers,
- a peeling plate configured to peel off the tape from the sheet by bending the tape set at an acute angle at a position between the first roller set and the second roller set,
- an affixing roller configured to affix the tape to the affixation target object by pressing the tape peeled off from the sheet by the peeling plate against the affixation target object,
- an air nozzle configured to make a distal end of the tape peeled off from the sheet conform to an outside surface of the affixing roller, and
- an end detecting unit configured to detect the distal end of the tape made to conform to the outside surface of the affixing roller, wherein the end detecting unit faces the affixing roller to thereby detect whether the distal end of the tape conforms with the outside surface of the fixing roller.
A tape affixing apparatus for using a tape set including a tape, the tape having an adhesive layer on one surface of the tape and being cut in a shape corresponding to an affixation target object, and a band-shaped sheet affixed to the adhesive layer, and affixing the tape to the affixation target object while peeling off the tape from the sheet, the tape affixing apparatus comprising:
- a holding unit configured to hold the affixation target object;
- an affixing unit configured to affix the tape peeled off from the sheet to the affixation target object held by the holding unit;
- and
- a horizontal moving mechanism configured to move the holding unit and the affixing unit relative to each other in a horizontal direction,
- the affixing unit including
- a first roller set configured to sandwich the tape set by at least two rollers,
- a second roller set configured to sandwich the sheet by at least two rollers,
- a peeling plate configured to peel off the tape from the sheet by bending the tape set at an acute angle at a position between the first roller set and the second roller set,
- an affixing roller configured to affix the tape to the affixation target object by pressing the tape peeled off from the sheet by the peeling plate against the affixation target object,
- an air nozzle configured to make a distal end of the tape peeled off from the sheet conform to an outside surface of the affixing roller, and
- an end detecting unit including a vibration generating unit disposed in the holding unit, the vibration generating unit configured to generate an ultrasonic vibration directed toward the affixing roller, the end detecting unit configured to detect the distal end of the tape made to conform to the outside surface of the affixing roller by analyzing the ultrasonic vibration generated by the vibration generating unit.
Dependencies are inferred from the claim text.