Robot control device, robot provided with the same, and robot system

A robot configured to transfer a substrate while holding the substrate, the robot comprising:

• a robotic arm having at least one joint axis;
• and
• an end effector provided to a tip end of the robotic arm and configured to hold the substrate,
• wherein the robot is disposed adjacent to an installation position at which the substrate is placed, and the installation position is a position where the substrate is taken in and out of a taking in-and-out plane,
• wherein a position and a posture of the end effector are defined by an X direction value, a Y direction value, a Z direction value, and an angle formed, as seen in a thickness direction of the substrate placed on the installation position, between a center line L of the end effector and a perpendicular line P drawn toward the taking in-and-out plane from a central point of the substrate placed on the installation position when the end effector is in a holding position and a holding posture, and
• wherein a first X direction value, a first Y direction value, a first Z direction value, and a first angle between the center line L and the perpendicular line P that define the holding position and the holding posture of the end effector for holding the substrate placed on the installation position by the end effector are all different from respective second X direction value, second Y direction value, second Z direction value, and second angle between the center line L and the perpendicular line P that define a withdrawn position and a withdrawn posture of the end effector after retreating the end effector in the holding position and the holding posture from the installation position.