Cleaning device and method of substrate transfer device

A cleaning device for a substrate transfer device, the cleaning device comprising:

• a traveling unit configured to travel along a rail to transfer a substrate;
• a rail unit comprising the rail and a rail structure disposed on the rail;
• and
• a rinsing unit attached to the traveling unit, the rinsing unit comprising a suction part and an elastic member,
• wherein the suction part rotates in a first horizontal direction when the rinsing unit is placed in contact with the rail structure in response to movement of the traveling unit along the rail, and wherein the suction part rotates in a second horizontal direction opposite to the first horizontal direction in response to receiving an elastic force from the elastic member when the rinsing unit is no longer in contact with the rail structure, and
• a rotation angle of the suction part in each of the first horizontal direction and the second horizontal direction is 90 degrees or less.

A cleaning method for a substrate transfer device, wherein the substrate transfer device comprises a rail unit having a rail and a rail structure, a traveling unit configured to travel on the rail, and a rinsing unit having a suction part, wherein the rinsing unit is attached to the traveling unit, the cleaning method comprising:

• moving the traveling unit into a first area of the rail and performing a first traveling process in which the rinsing unit is placed in contact with the rail structure, and the suction part rotates in a first horizontal direction in response to movement of the traveling unit in the first area of the rail;
• and
• moving the traveling unit into a second area of the rail and performing a second traveling process in which the rail structure and the rinsing unit become detached from each other, and the suction part rotates in a second horizontal direction opposite to the first horizontal direction in response to an elastic force from an elastic member associated with the rinsing unit, and
• a rotation angle of the suction part in each of the first horizontal direction and the second horizontal direction is 90 degrees or less.