Microfluidic antibody microarray with an electronic sensor array

A method of fabricating a device comprising:

• fabricating a mold;
• forming a portion of the device using the mold;
• forming a single fluid inlet port, a single outlet port and a plurality of separate parallel microfluidic paths in the molded portion of the device, said single fluid inlet port connected to the plurality of separate parallel microfluidic paths, each separate microfluidic path configured to transport a plurality of cells wherein each of the separate microfluidic paths comprise a plurality of microfluidic cell capture chambers, wherein at least two of the plurality of microfluidic cell capture chambers are cascaded along each separate microfluidic path, said separate parallel microfluidic paths connected to the single outlet port, wherein the single outlet port discharges a merged output of cells from the plurality of separate parallel microfluidic cell capture chambers;
• fabricating an electrical sensor network on a glass substrate, said electrical sensor network comprising a plurality of sensors, wherein each of the plurality of microfluidic cell capture chambers is associated with a corresponding one of the plurality of sensors to detect cells passing into or out of each respective microfluidic cell capture chamber, and wherein the electrical sensor network is further configured to detect as one or more of the plurality of cells enter the device, if any one or more of the plurality of cells pass from one of the at least two of the plurality of cascaded microfluidic cell capture chambers to another, and if any one or more of the cells is discharged from the device, to provide a count of cells or a distribution of cells captured by all or a portion of the plurality of cascaded microfluidic cell capture chambers;
• bonding the glass substrate to the molded portion of the device to form the device,
• wherein each of the microfluidic cell capture chambers is functionalized by introducing a capture antibody into each microfluidic cell capture chamber.