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US 12,370,487 B2Granted
Particulate matter filtration apparatus and method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Ming Tsao, Kuo-Cheng Huang
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Abstract
A system includes a semiconductor apparatus configured to process a workpiece, a mist generator configured to generate a mist and a particle separator configured to receive an exhaust gas generated by the semiconductor apparatus. The particle separator includes a first fan, wherein the first fan includes a plurality of blades. Each of the plurality of blades includes holes allowing the exhaust gas and the mist to pass through.
Claims20
A system, comprising:
- a semiconductor apparatus adapted to process a workpiece;
- and
- a particle separator adapted to receive an exhaust gas generated by the semiconductor apparatus, the particle separator comprising:
- a mist generator adapted to generate a mist;
- a first fan comprising a plurality of blades, wherein each of the plurality of blades includes holes allowing the exhaust gas and the mist to pass through;
- and
- an inner mesh member defining a central chamber of the particle separator, wherein the plurality of blades are coupled to the inner mesh member and adapted to rotate about the central chamber.
4 more elements
A system, comprising:
- a semiconductor apparatus adapted to generate an exhaust gas during an operation;
- and
- a particle separator comprising:
- a first fan adapted to filter particles in the exhaust gas, the first fan comprising a plurality of blades, each of the plurality of blades including holes;
- a mist dispenser extending in the first fan and adapted to dispense a mist into the first fan;
- and
- an inner mesh member defining a central chamber of the particle separator, wherein the plurality of blades are coupled to the inner mesh member and adapted to rotate about the central chamber.
4 more elements
A system, comprising:
- a semiconductor apparatus adapted to generate an exhaust gas during an operation;
- and
- a particle separator comprising:
- a first fan adapted to filter particles in the exhaust gas and comprising a plurality of blades, each of the plurality of blades including holes;
- a mist dispenser adapted to dispense a mist into the first fan;
- and
- an inner mesh member defining a central chamber of the particle separator, wherein the plurality of blades are coupled to the inner mesh member and adapted to rotate about the central chamber.
4 more elements
Dependencies are inferred from the claim text.