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US 12,368,424 B2Granted
High electromechanical coupling strength hollow disk resonators
AssigneeThe Regents of the University of California
InventorsClark T.-C. Nguyen, Yafei Li, Alper Ozgurluk
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Abstract
System and methods for a hollow-disk radial-contour mode resonator structure. The hollow disk reduces the dynamic mass and stiffness of the structure. Since electromechanical coupling Cx/Co goes as the reciprocal of mass and stiffness, the hollow disk structure has a considerably stronger electromechanical coupling than a solid one at the same frequency, and thus raises Cx/Co without excessive gap-scaling. Several embodiments of hollow disk resonators are detailed, including asymmetric and symmetric disk configurations.
Claims15
A capacitive-gap transduced resonator, comprising:
- a resonator disk comprising a disk which is symmetrically hollowed with upper and lower cavities and an outer circumferential wall, said disk coupled through a stem to a base structure;
- wherein said symmetrically hollowed disk has an outer circumferential wall which protrudes in both upwards and downwards directions;
- a first terminal disposed adjacent the disk at a spaced-apart distance defined by an air gap, with said first terminal fully overlapping said outer circumferential wall of said disk;
- and
- a second terminal in proximity to the disk;
- wherein the upper and lower cavities of the disk reduces the dynamic mass and stiffness to increase electromechanical coupling of the resonator;
- wherein the disk which is symmetrically hollowed to form the upper and lower cavities results in a thin disk having a radius R and a high-aspect-ratio circular edge ring of width of t.
4 more elements
Dependencies are inferred from the claim text.