Method of manufacturing a stator for an electric motor, stator, and electric motor

A stator for an electrical actuator, comprising:

• a solid body including layers of semiconductor material arranged between a first layer of insulating material and a second layer of insulating material;
• a ferromagnetic core region between the layers of semiconductor material, electrically insulated from the layers of semiconductor material;
• a plurality of conductive through vias through the solid body;
• a first plurality of conductive strips on the first layer of insulating material, which extend parallel to one another in positions corresponding to and above a first side of the core region;
• a second plurality of conductive strips on the second layer of insulating material, which extend parallel to one another in positions corresponding to and above a second side, opposite to the first side, of the core region, wherein the first plurality of conductive strips, the plurality of conductive through vias, and the second plurality of conductive strips are electrically connected together to form a coil wound around the core region;
• a first protective cap coupled to the second layer of insulating material and provided with a cavity that is to house the first plurality of conductive strips;
• a second protective cap coupled to the first layer of insulating material and provided with a respective cavity that is to house the second plurality of conductive strips;
• and
• a hole passing through at least one between the first protective cap and the second protective cap and through the first and second solid bodies, alongside the coil.

A method, comprising:

• forming a solid body including a first semiconductor layer between a first structural layer and second structure layer selectively etchable with respect to the first semiconductor layer;
• forming a ferromagnetic core region on the first structural layer;
• covering the core region with a protective dielectric layer;
• coupling a second semiconductor layer to the protective dielectric layer;
• forming a plurality of conductive through vias through the first and second semiconductor layers, the first structural layer, and a third structural layer coupled to the second semiconductor layer;
• forming, on the third structural layer in a position corresponding to and above a first side of the core region, a first plurality of conductive strips parallel to one another and in electrical contact with the plurality of conductive through vias;
• and
• coupling a first protective cap at the third structural layer, the first protective cap having a cavity designed to house the first plurality of conductive strips.