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US 12,368,049 B2Granted
Protective film agent and processing method of workpiece
AssigneeDisco Corporation
InventorsSho Osawa, Senichi Ryo, Yukinobu Ohura
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Abstract
There is provided a protective film agent with which a workpiece is coated when the workpiece is processed. The protective film agent includes a water-soluble resin, a light absorbing agent having a flavone structure, a flavonol structure, or an isoflavone structure, and a solvent that dissolves the resin and the light absorbing agent.
Claims8
A protective film agent with which a workpiece is coated when the workpiece is processed, the protective film agent comprising:
- a water-soluble resin;
- a light absorbing agent;
- and
- a solvent that dissolves the resin and the light absorbing agent, and
- wherein the light absorbing agent contains a transglycosylated compound, and the solvent contains water, and
- further wherein the transglycosylated compound is transglycosylated rutin.
3 more elements
A protective film agent with which a workpiece is coated when the workpiece is processed, the protective film agent comprising:
- a water-soluble resin;
- a light absorbing agent;
- and
- a solvent that dissolves the resin and the light absorbing agent, and
- wherein the light absorbing agent contains a transglycosylated compound, and the solvent contains water, and
- further wherein the transglycosylated compound is transglycosylated rutin or transglycosylated hesperidin.
3 more elements
Dependencies are inferred from the claim text.