Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
AssigneeASML Netherlands B.V.
InventorsRaymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg
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Abstract
A substrate holder for a lithographic apparatus has a main body having a thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or electric component such as an electrode, a sensor, a heater, a transistor or a logic device, and has a top isolation layer. A plurality of burls to support a substrate are formed on the thin-film stack or in apertures of the thin-film stack.
Claims20
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first side of the main body and a second side of the main body opposite to the first side;
- a plurality of first burls at the first side of the main body and having end surfaces to support a substrate;
- and
- a plurality of second burls at the second side of the main body,
- wherein each of the first burls and/or second burls has a cross-sectional width in a range of about 250 μm to about 500 μm, and
- wherein the main body is grounded.
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first side of the main body and a second side of the main body opposite to the first side;
- a plurality of first burls at the first side of the main body and having end surfaces to support a substrate;
- a plurality of second burls at the second side of the main body,
- wherein spacing between the first burls and/or between the second burls is between about 1.5 mm to about 3 mm, and
- wherein the main body is grounded.
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first side of the main body and a second side of the main body opposite to the first side;
- a plurality of first burls at the first side of the main body and having end surfaces to support a substrate;
- and
- a plurality of second burls at the second side of the main body,
- wherein the main body comprises at least one material selected from:
- cordierite, SiSiC, SiC, Zerodur ceramic, Invar alloy, ULE glass, aluminum nitride (AlN), ceramic, glass-ceramic, fused silica, boron nitride, or silicon nitride, and
- wherein the main body is grounded.
Dependencies are inferred from the claim text.