Graded-index polymer waveguide and manufacturing method thereof
AssigneeShennan Circuits Co., Ltd.
InventorsXiaofeng Liu, Guodong Wang, Hua Miao, Tengfei Yao, Rui Wang, Yongkai Li
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AssigneeShennan Circuits Co., Ltd.
InventorsXiaofeng Liu, Guodong Wang, Hua Miao, Tengfei Yao, Rui Wang, Yongkai Li
Estimating the term…
A graded-index polymer waveguide (30) and a manufacturing method thereof are provided. The method includes providing a waveguide substrate (1); manufacturing a waveguide lower cladding layer (2) on a surface of the waveguide substrate (1); coating a material of a waveguide core layer (3) having UV photosensitivity on a surface of the waveguide lower cladding layer (2) away from the waveguide substrate (1); performing a hot imprinting process for the material of the waveguide core layer by means of a flexible transfer film mold and forming a waveguide core layer (3) having an imprinted waveguide link structure; performing a heat treatment process for the waveguide core layer (3); performing a pre-exposure process for the waveguide core layer; coating a waveguide upper cladding layer on a surface of a waveguide core layer (3); and curing the waveguide core layer (3) and the waveguide upper cladding layer (4).
A manufacturing method of a graded-index polymer waveguide, comprising:
Dependencies are inferred from the claim text.