Acceleration sensor and method of making the same
AssigneeChongqing University
InventorsXiaoping Zhou, Ping Chen, Zhi Zhao, Junwei Chen, Zheyu Yang
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AssigneeChongqing University
InventorsXiaoping Zhou, Ping Chen, Zhi Zhao, Junwei Chen, Zheyu Yang
Estimating the term…
An acceleration sensor includes an upper base plate; a lower base plate; and a gallium-based liquid metal encapsulated in graphene. The lower base plate includes a first surface including at least one diamond channel, and the upper base plate includes a second surface including a metal electrode corresponding to the at least one diamond channel in position; the liquid metal is disposed in a center of the at least one diamond channel; the first surface is bonded to the second surface through an adhesive; the liquid metal is movable in the at least one diamond channel and is in electrical contact with the metal electrode of the upper base plate during movement.
An acceleration sensor, comprising:
Dependencies are inferred from the claim text.