Optical test apparatus and optical test method
AssigneeKabushiki Kaisha Toshiba
InventorsHiroshi Ohno, Hiroya Kano, Hideaki Okano
Life of this patent
Estimating the term…
Abstract
According to one embodiment, an optical test apparatus includes a first aperture, a second aperture, an image sensor, and a first lens. The first aperture includes a first aperture plane provided with a first wavelength selecting region. The second aperture includes a second aperture plane provided with a second wavelength selecting region different from the first wavelength selecting region. The image sensor is configured to image a light beam passing through the first aperture plane and the second aperture plane and reaching an imaging plane. The first lens is configured to make a light beam passing through the first aperture plane and the second aperture plane be incident on the imaging plane.
Claims14
An optical test apparatus comprising:
- a first aperture having a first wavelength selecting region, the first wavelength selecting region including a first region configured to allow a first light beam to pass through and a second region configured to allow a second light beam to pass through, the first light beam and the second light beam being light beams scattered by a test object, the first light beam being parallel to an optical axis at incidence and belonging to a first visible light range, the second light beam being non-parallel to the optical axis at incidence and belonging to a second visible light range;
- an image sensor configured to image the first light beam that has passed through the first region and the second light beam that has passed through the second region;
- and
- a processing circuit configured to obtain an intensity of the first light beam and the second light beam imaged by the image sensor for each wavelength and to calculate a scattering intensity distribution composed of the first light beam and the second light beam based on the intensity of the first light beam and the second light beam for each wavelength.
An optical test method comprising:
- imaging, by an image sensor, a first light beam and a second light beam, wherein the first light beam has passed through a first region of a first wavelength selecting region of a first aperture, the second light beam has passed through a second region of the first wavelength selecting region of the first aperture, the first light beam and the second light beam are light beams scattered by a test object, the first light beam is parallel to an optical axis at incidence and belongs to a first visible light range, and the second light beam is non-parallel to the optical axis at incidence and belongs to a second visible light range;
- obtaining an intensity of the first light beam and the second light beam imaged by the image sensor for each wavelength;
- and
- calculating a scattering intensity distribution composed of the first light beam and the second light beam based on the intensity of the first light beam and the second light beam for each wavelength.
Dependencies are inferred from the claim text.