Phase retrieval
AssigneeApplied Materials Israel Ltd.
InventorsBenny Kirshner, Boris Golberg
Life of this patent
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Abstract
A method for phase retrieval, the method may include (a) obtaining multiple out-of-focus intensity images of one or more point spread function targets; wherein the out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8; and (b) calculating phase information, based on the multiple out-of-focus intensity images and on a vectorial model of the point spread function.
Claims16
A method for phase retrieval, the method comprising:
- obtaining multiple out-of-focus intensity images of one or more point spread function targets;
- wherein the multiple out-of-focus intensity images are generated based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8;
- passing a majority of a collected scattered light beam through an opening of an apertured mirror of a light distribution unit of the optical unit;
- reflecting a minor part of the collected scattered light beam by a reflecting region of the apertured mirror to provide the residual collected light signals;
- and
- calculating phase information based on the multiple out-of-focus intensity images and on a vectorial model of a point spread function.
A method for phase retrieval, the method comprising:
- obtaining multiple out-of-focus intensity images of one or more point spread function targets;
- wherein the multiple out-of-focus intensity images are generated based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8;
- and
- calculating phase information based on the multiple out-of-focus intensity images and on a vectorial model of a point spread function;
- wherein at least two of the multiple out-of-focus intensity images are obtained with different illumination beam shaping conditions.
A computerized system for phase retrieval, the computerized system comprising a processing circuitry, an optical unit, and a memory unit, wherein the processing circuitry is configured to:
- receive multiple out-of-focus intensity images of one or more point spread function targets;
- wherein the multiple out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of the optical unit having a numerical aperture that exceeds 0.8;
- and
- calculate phase information, based on the multiple out-of-focus intensity images and on a vectorial model of a point spread function;
- wherein the optical unit comprises a light distribution unit that comprises an apertured mirror having an opening, wherein the opening is shaped and sized to receive a majority of a collected scattered light beam, while a minor part of the collected scattered light beam impinges on a reflecting region of the apertured mirror to provide the residual collected light signals.
A computerized system for phase retrieval, the computerized system comprising a processing circuitry, an optical unit, and a memory unit, wherein the processing circuitry is configured to:
- receive multiple out-of-focus intensity images of one or more point spread function targets;
- wherein the multiple out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of the optical unit having a numerical aperture that exceeds 0.8;
- and
- calculate phase information, based on the multiple out-of-focus intensity images and on a vectorial model of a point spread function;
- wherein the optical unit comprises an illumination module that is configured to change one or more illumination parameters during an acquisition of at least some of the multiple out-of-focus intensity images.
A non-transitory computer readable medium for phase retrieval, wherein the non-transitory computer readable medium stores instructions for:
- obtaining multiple out-of-focus intensity images of one or more point spread function targets;
- wherein the out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8;
- passing a majority of a collected scattered light beam through an opening of an apertured mirror of a light distribution unit of the optical unit;
- reflecting a minor part of the collected scattered light beam by a reflecting region of the apertured mirror to provide the residual collected light signals;
- and
- calculating phase information, based on the multiple out-of-focus intensity images and on a vectorial model of a point spread function.
Dependencies are inferred from the claim text.