# US 12,366,483 B2 · Wavefront sensors with irregular aperture masks, diffusers, and cameras, and methods of making and using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,366,483 B2 - Document ID: US12366483B2 - Status: Granted - Kind: B2 - Application number: 18/938,201 - Filed: 2024-11-05 - Published: 2025-02-20 - Granted: 2025-07-22 - Earliest claimed: 2020-12-15 - Assignees: Quartus Engineering Incorporated - Applicants: Quartus Engineering Incorporated - Inventors: Peter Pilarz; Jason Kuhn; Brian Dunne; Jesse Melrose - Web page: https://patentgrep.com/patent/US12366483B2 ## CPC - G01J 9/00: Measuring optical phase difference (devices or arrangements for controlling the phase of light beams G02F1/01); Determining degree of coherence; Measuring optical wavelength (spectrometry G01J3/00) - G06T 7/0002: {Inspection of images, e.g. flaw detection} - G06T 7/66: of image moments or centre of gravity - G06T 7/70: Determining position or orientation of objects or cameras (camera calibration G06T7/80) - G06T 7/80: Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ## Abstract A wavefront sensor for measuring a wavefront that includes an aperture mask configured to receive incident light, the aperture mask comprising a plurality of apertures irregularly spaced and arranged in a plurality of sub-windows that respectively transmit sub-beams of the incident light. A diffuser can receive the sub-beams transmitted by the plurality of apertures. A controller of the sensor is configured to identify measured sub-beams by convolving the sub-beams imaged on the diffuser with a map of the plurality of apertures; and measure the wavefront of the incident light based on changes in position of the sub-beams in a digital image of the diffuser relative to both reference positions and neighboring sub-beams. ## Claims ### Claim 1 A wavefront sensor for measuring a wavefront, comprising: an aperture mask configured to receive incident light, the aperture mask comprising a plurality of apertures irregularly spaced and arranged in a plurality of sub-windows that transmit sub-beams of the incident light; a diffuser configured to receive the sub-beams transmitted by the plurality of apertures; a controller configured to: identify measured sub-beams by convolving the sub-beams imaged on the diffuser with a map of the plurality of apertures; and measure the wavefront of the incident light based on changes in position of the sub-beams in a digital image of the diffuser relative to reference positions and neighboring sub-beams. ### Claim 2 (depends on 1) The wavefront sensor of claim 1, wherein the controller is configured to identify respective sub-beams in the digital image by a unique code. ### Claim 3 (depends on 1) The wavefront sensor of claim 1, further comprising: a source of collimated light having the wavefront. ### Claim 4 (depends on 3) The wavefront sensor of claim 3, wherein the source of collimated light comprises a laser. ### Claim 5 (depends on 3) The wavefront sensor of claim 3, further comprising: a beamsplitter configured to reflect light from the source to a surface the wavefront from which is to be measured. ### Claim 6 (depends on 4) The wavefront sensor of claim 4, further comprising: a beamsplitter configured to receive light that is reflected, diffused, or diffracted by a surface the wavefront from which is to be measured. ### Claim 7 (depends on 4) The wavefront sensor of claim 4, further comprising: a beamsplitter configured to transmit such light which then is incident on the mask. ### Claim 8 (depends on 1) The wavefront sensor of claim 1, wherein the controller is configured to determine a null position of each sub-beam and calculate a displacement of each sub-beam from the null position. ### Claim 9 (depends on 1) The wavefront sensor of claim 1, further comprising: a camera having a focal plane in which the diffuser is located, the camera being configured to obtain the digital image of the diffuser. ### Claim 10 A method for measuring a wavefront using a wavefront sensor, comprising: identifying measured sub-beams by convolving the sub-beams imaged on a diffuser of the wavefront sensor with a map of a plurality of apertures of an aperture mask of the wavefront sensor, the aperture mask configured to receive incident light and comprising the plurality of apertures that are irregularly spaced and arranged in a plurality of sub-windows that transmit sub-beams of the incident light, the diffuser configured to receive the sub-beams transmitted by the plurality of apertures; and measuring the wavefront of the incident light based on changes in position of the sub-beams in a digital image of the diffuser relative to reference positions and neighboring sub-beams. ### Claim 11 (depends on 10) The method of claim 10, further comprising: generating collimated light having the wavefront. ### Claim 12 (depends on 11) The method of claim 11, wherein a source of collimated light comprises a laser. ### Claim 13 (depends on 10) The method of claim 10, further comprising: using a beamsplitter to reflect light from a source to a surface the wavefront from which is to be measured. ### Claim 14 (depends on 10) The method of claim 10, further comprising: using a beamsplitter to receive light that is reflected, diffused, or diffracted by the surface the wavefront from which is to be measured. ### Claim 15 (depends on 10) The method of claim 10, wherein the measuring the wavefront comprises detecting sub-beam centroids in the digital image. ### Claim 16 (depends on 10) The method of claim 10, wherein the measuring the wavefront comprises undistorting sub-beam centroids in the digital image using an intrinsic camera calibration. ### Claim 17 (depends on 10) The method of claim 10, wherein measuring the wavefront comprises measuring a tilt of the incident light. ### Claim 18 (depends on 10) The method of claim 10, wherein measuring the wavefront comprises measuring a wavefront error of the incident light. ### Claim 19 (depends on 10) The method of claim 10, wherein measuring the wavefront comprises determining a null position of each sub-beam and calculating each a displacement of each sub-beam from its null position.